한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
- /
- Pages.106.1-106
- /
- 1998
AN OPTIMIZED NITRIDE RESIDUE PHENOMENA OF SHALLOW TRENCH ISOLATION (STI) PROCESS BY CHEMICAL MECHANICAL POLISHING (CMP)
- Kim, Sang-Y. (Dept. of Elect. Eng, Chungang Univ.) ;
- Kim, C.I. (Dept. of Elect. Eng, Chungang Univ.) ;
- Chang, E.G. (Dept. of Elect. Eng, Chungang Univ.) ;
- Seo, Y.I. (School of Elect. Eng. Daebool Univ.) ;
- Kim, T.H. (Dept. of Elect. Yeojoo Technical Collage) ;
- Lee, W.S. (Dept. of Elect. Eng, Chosun Univ.)
- 발행 : 1998.08.01