한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
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- Pages.68.1-68
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- 1998
INDUCTIVELY COUPLED PLASMA (ICP) OXIDATION FOR LOW-TEMPERATURE POLY-Si THIN FILM TRANSISTORS
- Park, Yong-Woo (Dept. of Materials Science and Engineering, KAIST, Taejon) ;
- Ahn, Byung-Tae (Dept. of Materials Science and Engineering, KAIST, Taejon)
- 발행 : 1998.08.01