한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
- /
- Pages.103.3-103
- /
- 1998
THERMAL STABILITY OF Nb-Si-N BARRIERS
- Bae, Hyung-Jin (Dept. of Met. Eng., Inha University) ;
- Shin, Young-Hoon (Dept. of Met. Eng., Inha University) ;
-
Lee, Chong-Mu
(Dept. of Met. Eng., Inha University)
- 발행 : 1998.08.01