Fabrication and characterization of various MFIS capacitors

  • Chung, Il-Sub (Electronic Mlaterials Lab., AMaterials Sector. Samsung Advanced Institute of Technology) ;
  • Kim, Chang-Jung (Electronic Mlaterials Lab., AMaterials Sector. Samsung Advanced Institute of Technology) ;
  • Kim, Tae-Young (Electronic Mlaterials Lab., AMaterials Sector. Samsung Advanced Institute of Technology)
  • Published : 1998.08.01