Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.133.3-133
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- 1998
$SrBi_2Ta_2O_9$ /INSULATORS/Si STRUCTURE FOR METAL/FERROELECTRICS/INSULATORS/Si(MFIS) in NDRO-TYPE FRAM
- Lee, Won-Jae (Semiconductor Technology Div. ETRI) ;
- Yu, Byoung-Gon (Semiconductor Technology Div. ETRI) ;
- Lyu, Jong-Son (Semiconductor Technology Div. ETRI) ;
- Shin, Chang-Ho (Dept. of Electri. Eng., KAIST) ;
- Lee, Hee-Chul (Dept. of Electri. Eng., KAIST) ;
- Lee, Jin-Hyo (Semiconductor Technology Div. ETRI) ;
- Kim, Bo-Woo (Semiconductor Technology Div. ETRI)
- Published : 1998.08.01
Abstract
Keywords