Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

1998.08a
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Pages.132.1-132
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1998

Materials Research Society of Korea (한국재료학회)

권호 표지

A STUDY ON THE DEPOSITION OF RuO$_2$ AND Ru WITH RUTHENOCENE BY METALLORGANIC CHEMICAL VAPOR DEPOSIT10N

Park, Sung-Eon (Div. of Mat. Sci. & Eng., Seoul National University) ;
Kim, Hyun-Mi (Div. of Mat. Sci. & Eng., Seoul National University) ;
Kim, Ki-Bum (Div. of Mat. Sci. & Eng., Seoul National University)

Published : 1998.08.01

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