Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.132.1-132
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- 1998
A STUDY ON THE DEPOSITION OF RuO$_2$ AND Ru WITH RUTHENOCENE BY METALLORGANIC CHEMICAL VAPOR DEPOSIT10N
- Park, Sung-Eon (Div. of Mat. Sci. & Eng., Seoul National University) ;
- Kim, Hyun-Mi (Div. of Mat. Sci. & Eng., Seoul National University) ;
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Kim, Ki-Bum
(Div. of Mat. Sci. & Eng., Seoul National University)
- Published : 1998.08.01
Abstract
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