한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
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- Pages.131.3-131
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- 1998
ELECTRICAL PROPERTIES OF PZT THIN FILMS DEPOSITED ON Ir, TEX>$IrO<_2$ BOTTOM ELECTRODES BY REACTIVE SPUTTERING
- Lee, H.S. (Dept. of Ceramic Eng., Ceramic Processing Research Center, Hanyang Univ.) ;
- Shin, H.G. (Dept. of Ceramic Eng., Ceramic Processing Research Center, Hanyang Univ.) ;
- Auh, K.H. (Dept. of Ceramic Eng., Ceramic Processing Research Center, Hanyang Univ.) ;
- Kim, I.D. (Dept. of Mat., Sci. and Eng. KIAST) ;
- Choi, W.Y. (Dept. of Mat., Sci. and Eng. KIAST) ;
- Park, Y.J. (Dept. of Mat., Sci. and Eng. KIAST) ;
- Hwang, K.T. (KITECH-KTL) ;
- Um, W.S. (KITECH-KTL)
- 발행 : 1998.08.01