THERMAL STABILITY OF $RuO_2$ AND Ru THIN FIMLS IN THE VARIOUS AMBIENTS

  • Ahn, Joon-Hyung (Dept. of Mat. Sci. and Engr., KAIST) ;
  • Park, J.H. (Dept. of Mat. Sci. and Engr., KAIST) ;
  • Choi, G.P. (Dept. of Mat. Sci. and Engr., KAIST) ;
  • Choi, W.Y. (Dept. of Mat. Sci. and Engr., KAIST) ;
  • Kim, H.G. (Dept. of Mat. Sci. and Engr., KAIST) ;
  • Lee, W.J. (Semi. Tech. Div., ETRI) ;
  • Yoon, S.G. (Dept. of Mat. Engr., Chungnam National Univ.)
  • 발행 : 1998.08.01