Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.131.1-131
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- 1998
THERMAL STABILITY OF $RuO_2$ AND Ru THIN FIMLS IN THE VARIOUS AMBIENTS
- Ahn, Joon-Hyung (Dept. of Mat. Sci. and Engr., KAIST) ;
- Park, J.H. (Dept. of Mat. Sci. and Engr., KAIST) ;
- Choi, G.P. (Dept. of Mat. Sci. and Engr., KAIST) ;
- Choi, W.Y. (Dept. of Mat. Sci. and Engr., KAIST) ;
- Kim, H.G. (Dept. of Mat. Sci. and Engr., KAIST) ;
- Lee, W.J. (Semi. Tech. Div., ETRI) ;
- Yoon, S.G. (Dept. of Mat. Engr., Chungnam National Univ.)
- Published : 1998.08.01
Abstract
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