Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.64.4-64
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- 1998
INFLUENCE OF RAPID THERMAL ANNEALING OF CERIUM OXIDE ON THE MORPBOLOGICAL AND ELECTRICAL PROPERTIES OF METAL/FERRO-ELECTRIC/INSULATOR/SEMICONDUCTOR CAPACITOR
- Lee, Ho. Nyung (Semiconductor Materials Laboratory, Korea Institute of Science and Technology) ;
- Shin, Dong-Suk (Semiconductor Materials Laboratory, Korea Institute of Science and Technology) ;
- Kim, Yong-Tae (Semiconductor Materials Laboratory, Korea Institute of Science and Technology) ;
- Choh, Sung-Ho (Department of Physics, Korea University, Seoul)
- Published : 1998.08.01
Abstract
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