한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
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- Pages.52.2-52
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- 1998
Preparation of Low Temperature PECVD SiOF Film and its Integration Issues for Next Generation Devices
- Lee, Gik-Sik (Dept. of Electrical and Computer Engineering, Louisiana State University)
- 발행 : 1998.08.01