Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

Materials Research Society of Korea (한국재료학회)
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Preparation of Low Temperature PECVD SiOF Film and its Integration Issues for Next Generation Devices

  • Lee, Gik-Sik (Dept. of Electrical and Computer Engineering, Louisiana State University)
  • Published : 1998.08.01
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