LOW TEMPERATURE PREPARATION OF FERROELECTRIC $SrBi_{2}Ta_{2}O_{9}$ THIN FILEMS BY A MODIFIED RF MAGNETRON SPUTTERING TECHNIQUE

  • Yang, Cheol-Hoon (Department of Materials Engineering, Chungnam National University, Daeduk Science Town) ;
  • Kim, Jae-Sun (Department of Materials Engineering, Chungnam National University, Daeduk Science Town) ;
  • Yoon, Soon-Gil (Department of Materials Engineering, Chungnam National University, Daeduk Science Town)
  • 발행 : 1998.08.01