한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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- Pages.363-366
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- 1998
개량형 대향타겟스퍼터장치에 의한 Co-Cr 박막의 미세구조
Microstructure of Co-Cr Thin Films Deposited by Improved Facing Targets Sputtering System
초록
Shuttered Co-Cr thin films have been developed continuously as one of the major candidates for high density recording media. In this study, Co-26at%Cr thin films with c-axis oriented h.c.p. structure prepared by a improved facing targets sputtering system. We find that the effect of microstructural changes of sputtered Co-Cr thin films on magnetic properties and changes of crystal orientation due to variation substrate temperature.
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