한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1998년도 춘계학술대회 논문집
- /
- Pages.83-86
- /
- 1998
Sol-Gel법으로 제작한 PZT(40/60)/(60/40) 이종층 박막의 강유전특성
Ferroelectric Properties of the PZT(40/60)/(60/40) Heterolayered Thin Film Prepared by Sol-Gel Method
초록
Ferroelectric PZT(40/67)/PZT(60/40)heterolayered thin films were Prepared by the alkoxide-based Sol-Gel method. PZT(40/60) and PZT(60/40) stock solutions were made and spin-coated on the P7Ti/Si02/Si substrate alternately. These PZT(40/60) and PZT(60/40) films were dried at 300
키워드