Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.11a
- /
- Pages.157-157
- /
- 1998
Hydrogen Plasma Pre-treatment Effect on the Deposition of Aluminum Thin Films from MOCVD Using Dimethylethylamine Alane
Dimethylethylamine Alane를 이용한 CVD 알루미늄박막 증착의 수소플라즈마 전처리효과
Abstract
Keywords