Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.11a
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- Pages.108-108
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- 1998
A Study on the Structural Characteristics of DLC films by Plasma Emission Spectroscopy Analysis
플라즈마 분광 분석을 통한 DLC 박막의 구조 특성 연구
Abstract
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