Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

Materials Research Society of Korea (한국재료학회)
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Determination of thickness and optical properties of fluorocarbon thin film on aluminum by a variable angle spectroscopic ellipsometry

  • Lee, Kang-Kuk (Department of Metallurgy and Materials Engineering, Hanyang University) ;
  • Kwon, Myoung-Jong (Department of Metallurgy and Materials Engineering, Hanyang University) ;
  • Park, Jin-Goo (Department of Metallurgy and Materials Engineering, Hanyang University)
  • Published : 1998.11.01
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