대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)
- 대한전자공학회 1998년도 추계종합학술대회 논문집
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- Pages.617-620
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- 1998
와전류탐침을 이용한 LCD용 비접촉식 면적저항 측정기의 구현
Realization of Non-contact Sheet Resistance Measurement System for LCD using Eddy Current Probe
초록
In this paper we realized non-contact sheet resistance measurement system using eddy current. Proposed system is designed to meet the requirements which is necessary when dealing with conducting thin films on large area LCD panel. With several metals we could get lift-off curves which has the same trend as in principal. Especially in the region of high conductivity this system has more discriminating ability than 4-point probe system.
키워드