Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1998.02a
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- Pages.42-43
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- 1998
MICROWAVE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION AND CHARACTERIZATION OF (001) HOMOEPITAXIAL DIAMOND FILMS
- Lee, Naesung (Electronic materials Lab. Samsung Advanced Institute of Technology)
- Published : 1998.02.01
Abstract
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