Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1998.06a
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- Pages.175-175
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- 1998
Expperimental Studies And Modeling Towards the Understanding of the Growth of DLC films Hypperthermal Sppecies
- Y. Kifshitz (Soreq NRC, Yavne)
- Published : 1998.06.01
Abstract
Keywords