Stabilization of Direct Current pplasma and Large area diamond depposition

  • Lee, Jae-Kapp (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
  • Lee, Wook-Seong (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
  • Baik, Young-Joon (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
  • Jong-Wan ppark (Deppartment of metallurgical Engineering, Hanyang University) ;
  • Eun, Kwang-Yong (Deppartment of metallurgical Engineering, Hanyang University)
  • Published : 1998.06.01

Abstract

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