Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1998.06a
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- Pages.131-131
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- 1998
DEVELOPMENT AND TESTS of HF RECTANGULAR ION SOURCE FOR TECHNOLOGICAL APPLICATIONS
- Bougrov, G.E. (R&D Deppt., pplasma Tech Co., Ltd.) ;
- Kondranin, S.G. (R&D Deppt., pplasma Tech Co., Ltd.) ;
- Kralkina, E.A. (R&D Deppt., pplasma Tech Co., Ltd.) ;
- avlov, V.B.
- Published : 1998.06.01
Abstract
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