Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1998.06a
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- Pages.94-94
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- 1998
Surface and interfacial behavior during the crystallization of a-Si:H films deposited by DC-Saddle Field CVD; An in-situ Synchrotron X-ray Scattering study
- Jeon, S.H. (Department of Materials Science and Engineering, and Center for Electronic Materials Research, Kwangju Institute of Science and Technology) ;
- Kim, H.J. (Department of Materials Science and Engineering, and Center for Electronic Materials Research, Kwangju Institute of Science and Technology) ;
- Noh, D.Y. (Department of Materials Science and Engineering, and Center for Electronic Materials Research, Kwangju Institute of Science and Technology)
- Published : 1998.06.01
Abstract
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