Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1998.06a
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- Pages.82-82
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- 1998
A study on the interface of AIN/Si
- Roh, Yong-Suk (Department of Physics and Atomic Scale Surface Science Research Center, Yonsei University) ;
- Kim, Shin-Cheul (Department of Physics and Atomic Scale Surface Science Research Center, Yonsei University) ;
- Kim, Ui-Sik (Department of Physics and Atomic Scale Surface Science Research Center, Yonsei University) ;
- Jeong, Kwang-Ho (Department of Physics and Atomic Scale Surface Science Research Center, Yonsei University)
- Published : 1998.06.01
Abstract
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