Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Microdrilling of Glass Substrates by Electrochmical Discarge Machining in NaOH Solutions

NaOH 수용액에 있어서 전기화화적 방전가공법에 의한 유리기판의 미세가공

  • 홍석우 (동서대학교 전자기계공학부) ;
  • 제우성 (동명정보대학교 정보공학부) ;
  • 최영규 (신라대학교 광공학과) ;
  • 정귀상 (동서대학교 전자기계공학부)
  • Published : 1998.07.20
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Abstract

Electro Discharge Machining (EDM) is a so-call nonconventional machining technique. This paper presents the experimental results of an EDM technique for the fabircation of microholes on #7440 pyrex glass substrates. With various applied voltages and various concentration of NaOH or KOH solution, the glass substrates have been microdrilled using the copper electrodes of which diameters are 250 ${\mu}m$ to 450 ${\mu}m$. The machined throughholes have been observed the top diameter, the bottom diameter and machining time have been measured. EDM in NaOH solution causes the fabrication to have better the surface condition, higher selective of electrode, lower concentration of solution with respect to EDM in KOH solution machined fabrication.

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