Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1998.07d
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- Pages.1355-1357
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- 1998
Electrical and Structural Properties of $CaF_2$ Film for TFT Applications
TFT응용을 위한 $CaF_2$ 박막의 전기적, 구조적 특성
- Kim, Do-Young (School of Electrical and Computer Engineering, Sungkyunkwan Univ.) ;
- Choi, Suk-Won (School of Electrical and Computer Engineering, Sungkyunkwan Univ.) ;
- Yi, Jun-Sin (School of Electrical and Computer Engineering, Sungkyunkwan Univ.)
- Published : 1998.07.20
Abstract
TFT의 게이트 절연막으로 사용되는 절연체는 우수한 절연특성과 낮은 계면포획전하밀도(
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