Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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The Variation of the Characteristics of DLC Thin films by Pulsed Laser Deposition

레이저 증착변수에 의한 다이아몬드상 카본 박막특성 변화

  • 방성식 (연세대학교 전기공학과) ;
  • 이상렬 (연세대학교 전기공학과) ;
  • 정해석 (연세대학교 세라믹공학과) ;
  • 박형호 (연세대학교 세라믹공학과)
  • Published : 1998.07.20
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Abstract

Diamond like carbon(DLC) thin films possesed not only marvelous material charateristics such as large thermal conductivity, high hardness and being chemically inert, but also possesed negative electron affinity(NEA) properties. The NEA is an extremely desirable property of the material used in microelestronics and vacuum microelestronics device. DLC films were fabricated by pulsed laser deposition(PLD). The effect of the laser energy density and the substrate temperature on the properies of DLC films was investigated. The experiment was accomplished at temperatures in the range of room temperature to $400^{\circ}C$. The laser energy density was in the range of $6 J/cm^2$ to $16 J/cm^2$.

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