Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Magnetic Properties of Co-Cr Thin Films Deposited by FTS Method

FTS 방식으로 증착된 Co-Cr 박막의 자기적 특성

  • 손인환 (광운대학교 전기공학과) ;
  • 김명호 (경원전문대학 건축설비과) ;
  • 공석현 (경원대학교 전기.전자공학부) ;
  • 김경환 (경원대학교 전기.전자공학부) ;
  • 중천무수 (동경공업대학 전자물리과) ;
  • 직강정언 (동경공업대학 전자물리과)
  • Published : 1998.07.20
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Abstract

The Co-Cr thin films are one of the most suitable candidates for perpendicular magnetic recording media. The facing targets sputtering(FTS) method has a advantage of preparing films over a wide range of working gas pressure on plasma-free substrates. In this study, we investigated the possibility of employing FTS system for depositing Co-Cr films, Co-Cr thin films were deposited with continuously sputter gas pressure ($P_{Ar}$ = 0.1 mTorr) by FTS method at temperature of $40^{\circ}C$. We find that the change of thickness and deposition rate of sputtered Co-Cr thin films affect crystal orientation and magnetic properties. Crystallographic and magnetic properties were evaluated by x-ray diffractometry(XRD) and vibrating sample magnetometer(VSM) respectively. It has been confirmed that the FTS method is very useful for preparing Co-Cr thin film recording media.

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