Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1998.07g
- /
- Pages.2527-2529
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- 1998
Measurements of Dynamic Response of Micro-Mirror using Position Sensitive Detector
PSD를 이용한 MMAD의 동작특성 측정에 관한 연구
- Kim, Jong-Kook (Department of Electrical Engineering, Chung-Ang University) ;
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Kim, Ho-Seong
(Department of Electrical Engineering, Chung-Ang University)
;
- Shin, Hyung-Jae (Samsung Electronics, LTD)
- Published : 1998.07.20
Abstract
Measurement equipment, which consists of He-Ne laser, objective lens, CCD camera and position sensitive detector, was developed for the dynamic response of micromirror. This equipment can measure the tilting direction and angle, the rise time and frequency response of micromirror to the input signal. It was found that the rise time of the micromirror was less than 10
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