대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1997년도 추계학술대회 논문집 학회본부
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- Pages.609-611
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- 1997
백금 미세발열체를 이용한 유량센서의 제작
The Fabrication of Flow Sensors Using Pt Micro Heater
- Noh, Sang-Soo (Division of Electronics and Mechanical Engineering, Dongseo university) ;
- Chung, Gwiy-Sang (Division of Electronics and Mechanical Engineering, Dongseo university)
- 발행 : 1997.11.29
초록
Pt thin films flow sensors were fabricated by using aluminum oxide films as medium layer and their characteristics were investigated after annealing at
키워드