Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1997.11a
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- Pages.324-326
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- 1997
A properties and the fabrication of ZnO-Si system CO gas sensor with low power consumption
절전형 ZnO-Si계 CO 가스 센서 제작과 그 특성
- Yi, S.H. (Dept., of Electrical Eng., KOREA Univ.) ;
- Hung, H.K. (Dept., of Electrical Eng., KOREA Univ.) ;
- Kim, J.K. (Dept., of Electrical Eng., KOREA Univ.) ;
- Chang, B.H. (Dept., of Electrical Eng., KOREA Univ.) ;
- Sung, Y.K. (Dept., of Electrical Eng., KOREA Univ.)
- Published : 1997.11.29
Abstract
Low power ZnO-Si gas sensor below 500 mW at operating temperature has been fabricated by using micromachining technique. I-V measurement shows the power consumption of 260 mW at
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