원자층 감도의 실시간 스트레스 측정

IN SITU STRESS MEASUREMENT WITH MONOATOMIC LAYER SENSITIVITY

  • Kim, Young-Suk (Dept. of Physics, Korea Advanced Institute of Science and Technology) ;
  • Shin, Sung-Chul (Dept. of Physics, Korea Advanced Institute of Science and Technology)
  • 발행 : 1997.11.01