한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1997년도 추계학술대회 논문집
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- Pages.413-417
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- 1997
플라즈마 식각후 처리에 의한 Al alloy막의 부식 억제 효과
Effects of anti-corrosion of the Al alloy film by the post-etch treatment
초록
In this study, chlorine(Cl)-based gas chemistry is generally used to etching for AlCu films metallization. The corrosion phenomena of AlCu films were examined with XPS (X-ray photoelectron spectroscopy), SEM (Scanning electron microscopy), and TEM (Transmission electron microscopy). SF
키워드