Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1997.11a
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- Pages.393-396
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- 1997
Microdrilling of Glass Substrates by Electrochemical Discharge Machining
전기화학적 방전법에 의한 유리기판의 미세가공
Abstract
Electro Discharge Machining (EDM) is a so-call non-conventional machining technique. This paper presents the experimental results of an EDM technique for the fabircation of microholes on #7440 pyrex glans. With various applied voltages and at various concentration of KOH solution, the glass substrate have been microdrilled using the copper electrodes of which diameters are 250
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