Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1997.11a
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- Pages.246-249
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- 1997
Synthesis of Diamond thin films by RF Plasma CVD
RF Plasma CVD에 의한 다이아몬드 박막의 합성
Abstract
Diamond thin films were deposited on Si wafer from a mixture of CE
Keywords