Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1997.11a
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- Pages.515-517
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- 1997
A Study on Penning Effect in Plasma Discharge
플라즈마 방전에서 패닝 효과에 관한 연구
- Lee, Jong-chan (School of Electrical Engineering Wonkwang University) ;
- Lee, Cheong-hak (School of Electrical Engineering Wonkwang University) ;
- Park, Dae-hee (School of Electrical Engineering Wonkwang University)
- Published : 1997.11.01
Abstract
In this paper, the penning effect was studded to control accelerating of the ionization that means Increasing of cross-sectional collision through penning reactions in the plasma cells of Hg-Ar-Ne (x: 10-x, 60Torr) gas discharge under various concentrations of Ar.
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