Abstract
A low loss x-cut LiNbO$_3$ optical waveguide was fabricated by Ti in-diffusion and the guided-mode properties and total insertion loss of pigtailing with polarization maintaining fiber(PMF) were investigated and measured at optical wavelength 15507. For formaing the waveguide, the parameters of diffusion Ti thickness, waveguide line-width, length, diffusion temperature, time and atmosphere were set 1400$\AA$, 8${\mu}{\textrm}{m}$, 3.3cm, 105$0^{\circ}C$, 8 hours and wet bubbled oxygen, respectively. and then After the polishing and pigtailing, it showed that total insertion loss was -4.1dB for TM mode, -5.5dB for TE mode, and mode size, that is, horizontal/vertical sizes were 13.87/18${\mu}{\textrm}{m}$ for TM mode, 9.61${\mu}{\textrm}{m}$/6.5${\mu}{\textrm}{m}$ for TE mode.