Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1997.11a
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- Pages.25-29
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- 1997
A Study on the TDDB Characteristics of Superthin ONO structure
초박막 GNO 구조의 TDDB 특성에 관한 연구
Abstract
Capacitor-type MONOS (metal-oxide-nitride-oxide- semiconductor) NVSMs with 23
Keywords