Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1997.10a
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- Pages.154-154
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- 1997
Electrical Characterization of Ultra-Shallow Junctions Formed by Using $CoSi_2$ as Diffusion Source
$CoSi_2$ 를 확산원으로 형성한 매우 얇은 접합의 전기적 특성
Abstract
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