Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1997.10a
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- Pages.147-147
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- 1997
A Study on the Pt/Ru double metal electrode for prevention of oxidation of underlying TiN Diffusion barrier in high dielectric memory
TiN의 산화방지를 위한 고유전 박막기억소자용 Pt/Ru 이중금속전극 형성에 관한 연구
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