Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1997.10a
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- Pages.129-129
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- 1997
Characteristics of FerroelectricSr${Bi}_{2}{Ta}_{2}{O}_{9}$ Thin Films Deposited onto MOCVD-Pt by Plasma-Enhanced Metalorganic Chemical Vapor Deposition
Plasma-Enhanced MOCVD법에 의해 MOCVD-Pt 위에 제조된 강 유전체 Sr${Bi}_{2}{Ta}_{2}{O}_{9}$ 박막의 특성
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