Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1997.10a
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- Pages.109-109
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- 1997
A Study on the Threading Dislocations in the Fabrication of CMOS Retrograde Well Including A Buried Layer
Buried Layer를 포함한 CMOS Retrogade Well 형성시 Threading Dislocation에 관한 연구
Abstract
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