Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1997.10a
- /
- Pages.101-101
- /
- 1997
Anisotropic Etching of Tungsten-nitride with inductively coupled plasma
ICP 플라즈마를 이용한 W$N_{x}$ 의 이방성 식각
Abstract
Keywords