Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1997.05a
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- Pages.97-97
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- 1997
Crystallinity and Effect on Plasma Damage of MgO Thin Film prepared by RF Magnetron Sputtering
RF Magnetron Sputtering법에 의해 형성된 MgO 박막의 결정성과 Plasma Dmage에 미치는 영향
Abstract
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