Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1997.05a
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- Pages.49-49
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- 1997
An Investigation of Two Step Deposition Method for the Improvement of leakage Current and Dielectric Property of BST Thin Film
BST 박막의 누설전류 및 유전특성 향상을 위한 2단계 증착법에 관한 연구
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