Room tempperature 1.54 $mu m Er^{3+}$ luminescence from erbium dopped oxygen-rich silicon depposited by electron cyclotron resonance pplasma enhanced vappor depposition

Shin, Jung-H. (Deppartment of Physics, Korea advanced Institute of Science and Technology) ;
Kim, Mun-Jun (Deppartment of Physics, Korea advanced Institute of Science and Technology) ;
Seo, Se-Young (Deppartment of Physics, Korea advanced Institute of Science and Technology) ;
Lee, choo-Chon (Deppartment of Physics, Korea advanced Institute of Science and Technology)