Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Fabrication processes and problems of microelectromechanical system device based on PZT films

  • Yoon Young Soo (Division of Ceramics, KIST. pp.O. BOX 131, Cheongryang Seoul 130-650 Korea)
  • Published : 1997.07.01
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