Suppersonic Molecular Jet Epitaxy Of Cubic SiC Thin Films Using Single Source Organosilicon Compounds

  • Boo, Jin-Hvo (Institute of Vacuum industrial Technology and Deppartment of Chemistry, Sung Kyun Kwan University, Suwon 440-746) ;
  • Lee, Soon-Bo (Suppersonic Molecular Jet Eppitaxy Of Cubic SiC Thin Films Using Single Source Organosilicon comppounds) ;
  • Ustin, Ustin Scott A. (Materials Science Center and Deppartment of Physics, Cornell University, ithaca, NY 14853-2501, USA) ;
  • Ho, Wilson (Materials Science Center and Deppartment of Physics, Cornell University, ithaca, NY 14853-2501, USA)
  • 발행 : 1997.07.01