Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1997.07a
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- Pages.45-45
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- 1997
Suppersonic Molecular Jet Epitaxy Of Cubic SiC Thin Films Using Single Source Organosilicon Compounds
- Boo, Jin-Hvo (Institute of Vacuum industrial Technology and Deppartment of Chemistry, Sung Kyun Kwan University, Suwon 440-746) ;
- Lee, Soon-Bo (Suppersonic Molecular Jet Eppitaxy Of Cubic SiC Thin Films Using Single Source Organosilicon comppounds) ;
- Ustin, Ustin Scott A. (Materials Science Center and Deppartment of Physics, Cornell University, ithaca, NY 14853-2501, USA) ;
- Ho, Wilson (Materials Science Center and Deppartment of Physics, Cornell University, ithaca, NY 14853-2501, USA)
- Published : 1997.07.01
Abstract
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